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The science and engineering of microelectronic fabrication

Campbell,Stephen A.1954-

The science and engineering of microelectronic fabrication Stephen A. Campbell - 2nd ed. - Oxford Oxford University 2001 - xiv,603

Includes Index

ISBN: 0195136055

Subjects--Topical Terms:
Microelectronics
Semiconductors

Dewey Class. No.: 621.38152 / CAM P1

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