Campbell,Stephen A.1954- <br/><br/>
The science and engineering of microelectronic fabrication 
Stephen A. Campbell 
 - 2nd ed. 
 - Oxford  Oxford University  2001 
 - xiv,603 
<br/><br/> Includes Index 
<br/><br/><label>ISBN: </label>0195136055 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microelectronics<br/>Semiconductors
<br/><br/><label>Dewey Class. No.: </label>621.38152  / CAM P1