| 000 | 00561nam a2200205Ia 4500 | ||
|---|---|---|---|
| 008 | 230515s9999||||xx |||||||||||||| ||und|| | ||
| 020 | _a0195136055 | ||
| 040 | _aMAIN | ||
| 041 | _aEnglish | ||
| 082 |
_a621.38152 _bCAM P1 |
||
| 100 | _aCampbell,Stephen A.1954- | ||
| 245 | 4 |
_aThe science and engineering of microelectronic fabrication _cStephen A. Campbell |
|
| 250 | _a2nd ed. | ||
| 260 |
_aOxford _bOxford University _c2001 |
||
| 300 | _axiv,603 | ||
| 500 | _aIncludes Index | ||
| 650 | _aMicroelectronics | ||
| 650 | _aSemiconductors | ||
| 942 | _cBK | ||
| 999 |
_c14302 _d14302 |
||