000 00511nam a2200193Ia 4500
008 230515s9999||||xx |||||||||||||| ||und||
020 _a8122405614
040 _aMAIN
041 _aEnglish
082 _a621.3815
_bTAN N3
100 _aTandon, U.S.
245 0 _aPatterning of material layers in subricson region
_cU.S.Tandon, W.S.Khokle
260 _aNew Delhi
_bWiley Eastern
_c1993
300 _axii,183
650 _aDigital electronic
650 _aElectronics
700 _aKhokle, W.S
942 _cBK
999 _c6112
_d6112